MEMS Fabrication

نویسنده

  • Gary K. Fedder
چکیده

This summary of selected microelectromechanical systems (MEMS) processes guides the reader through a wide variety of fabrication techniques used to make micromechanical structures. Process flows include wet bulk etching and wafer bonding, surface micromachining, deep trench silicon micromachining, CMOS MEMS, and micromolding.

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تاریخ انتشار 2003